Reliable door monitoring for the production of semiconductor wafers

Process machines for the production of semiconductor wafers have many access doors. The STR1 safety switch and the Flexi Compact safety controller monitor these access doors. Thanks to the Flexi Loop safe series connection, wiring is particularly easy and efficient. Individual monitoring of the sensors with detailed diagnostics also leads to quick problem solving.

  • Following product families can be used
    • Response range of up to 14 mm
    • Small housing with flexible mounting options
    • Sensor activation possible from three sides
    • Four different actuators available
    • Universally coded, uniquely coded, and permanently coded sensors
    • PL e (EN ISO 13849), SIL3 (IEC 61508)
    • Safe series connection of up to 30 sensors possible
    • Software-programmable safety controller with modular hardware platform
    • High performance Safety over EtherCAT® backplane bus
    • User-friendly housing in a slim design
    • Intuitive Safety Designer configuration software
    • Data communication in common fieldbus systems
    • Safe series connection with Flexi Loop
    • Series connection of 32 sensors with up to 100 m per segment in compliance with performance level PL e
    • Compatible with sensors from all manufacturers
    • Detailed diagnostic information
    • Integrated standard inputs and outputs
    • Voltage supply for sensors is included
    • Unshielded standard cable featuring M12 connectivity
    • IP65 and IP67 enclosure rating
    • Intelligent accessories for field diagnostics and commissioning