Height measurement for focus adjustment

High-precision inspection and laser systems in semiconductor or display production require lens systems with very precise focusing. The OD5000 displacement measurement sensor can measure a height profile of the lead frame with precision down to the last micrometer with up to 80,000 measurements per second. This data makes it possible to control the focus position and therefore achieve optimal process results.

  • Following product families can be used
    • Measuring frequency up to 80 kHz
    • Ethernet interface with TCP/IP protocol directly in the sensor head
    • Web server interface for configuration
    • Innovative analysis algorithm
    • Maximum repeatability for positioning tasks
    • Detection and measurement of the smallest indentations or holes