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  • Process tool automation
  • Home
  • Industries
  • Semiconductor
  • Front-end production
  • Process tool automation

Process tool automation

Process tool automation
Reliable detection in aggressive process environments
Application
Reliable detection in aggressive process environments
Monitoring the positions of wafer carriers
Application
Monitoring the positions of wafer carriers
Corrosive chemical level measurement
Application
Corrosive chemical level measurement
Notch recognition on semiconductor wafers
Application
Notch recognition on semiconductor wafers
Accurate wafer mapping in magazines
Application
Accurate wafer mapping in magazines
Height measurement for focus adjustment
Application
Height measurement for focus adjustment
Height measurement for focus adjustment
Application
Presence and position monitoring on the wafer robot
Height measurement for focus adjustment
Application
Quick and accurate wafer detection
Height measurement for focus adjustment
Application
Determining the position of wafer robots using motor feedback
Height measurement for focus adjustment
Application
Detecting leaks in chemical containers
Height measurement for focus adjustment
Application
Measuring layer thicknesses on semiconductor wafers
Height measurement for focus adjustment
Application
Reliable door monitoring for the production of semiconductor wafers
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